Nanofabrication

Equipment

Our Nanofabrication facility offers a range of equipment for advanced nanofabrication, including lithography, etching, deposition, annealing and growth, wafer bonding, characterisation and backend tools.

For our current capabilities, please download the latest: 

Nanofabrication Facility equipment list 2017 (.pdf)

The Zepler Institute is a community of researchers from the University of Southampton’s Optoelectronics Research Centre, Electronics and Electrical Engineering Group, Nanoelectronics and Nanotechnology Group and Quantum Light and Matter Group